NANOS EBSD

With integrated EBSD capability

Combine high-resolution SEM imaging with EBSD analysis in a compact, easy-to-use tabletop platform. By analyzing diffraction patterns, it can accurately measure microstructural information such as crystal orientation, phase, and grain structure, while also enabling integrated elemental and crystallographic analysis in combination with EDS.

Infos / Datasheet

Eucentric tilt: the key to seamless EBSD

The combination of eucentric tilt and EBSD creates a seamless workflow between imaging and crystallographic analysis. You can image the sample at both 0° and the 70° EBSD position simply by tilting the stage, without breaking vacuum or repositioning the sample. Thanks to the eucentric tilt, the field of view, working distance and focus are maintained during tilting, so an area identified during imaging can be brought directly into the EBSD position without losing the region of interest. This makes switching between imaging and EBSD fast, intuitive and highly reproducible.

Product Features:

  • Resolution: <8 nm
  • EBSD + EDS Embedded
  • Eucentric tilt up to 70°: Keep your region of interest centered and in focus while tilting.
  • Crystallographic Analysis in Tabletop SEM: Access crystal orientation and structure information directly on a tabletop SEM.
  • Fast & Reliable Orientation Mapping: Rapidly map crystal orientations across the sample.
  • Phase Identification Capability: Identify and distinguish different crystalline phases.
  • Compact & Integrated Design: Fully integrated EBSD functionality in a compact setup.
  • Combined EDS & EBSD Platform
  • Easily switch between EDS and EBSD analysis in the same system.