Over the course of nearly 10 years of research and development at the University of Waterloo, with the support of DARPA, ICSPI has integrated all the components of a normal AFM onto a single 1 mm x 1 mm silicon chip using our patented MEMS (micro-electro-mechanical systems) technology. Our chip features an integrated piezoresistive sensor, and vertical and lateral actuators, making it self-actuating and self-sensing. The result of our technology is the first AFM-on-a-chip: the nGauge AFM.

• ICSPI nGauge Datasheet