RGA100, RGA200 and RGA300

• 100, 200 and 300 amu systems
• 1 amu resolution
• 6 orders of magnitude dynamic range in a single scan
• 0,65 x 10^-12 mbar detection limit
• RGA Windows and LabVIEW software
• Easy to maintain
• RS-232 interface

Datasheet

 

     PPM100 — Partial Pressure Monitor for RGA

• Stand-alone RGA Monitor
• 8-channel process control
• Pressure vs. time curves
• 4 analog input/output ports
• RS-232, GPIB and USB interface
• Webinterface

Datasheet

     

     CIS100, CIS200 and CIS300 Closed Ion Source - Residual Gas Analyser

• 100, 200, and 300 amu systems
• 1 ppm detection
• 0,013 mbar max. operating pressure
• 0,13 x 10^-12 mbar detection limit
• Real-time RGA Windows software
• Easy to maintain
• RGA and CIS Mode

Datasheet

     

     UGA100, UGA200 and UGA300 - Universal Gas Analysers

• Operating range from atmospheric pressure to UHV
• 100, 200 and 300 amu systems
• Fast response time (<0.2 s)
• Thermionic Amplifier is standard for all systems
• Stand-alone leak detection
• Integrated heating to bake out to 120 °C
• Windows software communication over RS-232 or Ethernet
• Corrosion-resistant
• Multi-kappillare  inputs (opt.)

Datasheet

     

     QMS100, QMS200 and QMS300 Gas Analysers

• 100, 200 or 300 amu Systeme
• Pressure of 10 mbar to 1 bar
• Better than 1 amu resolution
• <0.5 sec. response time
• Easily transportable by compact design
• 6 decades of dynamic range
• RGA Windows software
• RS-232 interface

Datasheet

     

     PPR100, PPR200 and PPR300 Vakuumprozess-Monitoring

• 0.01, 0.13, 1.3 or 13 mbar inlet pressure
• 2 sec. response time (0,13 mbar)
• 100, 200 or 300 amu systems
• Easy to maintain
• 6 Dekaden Dynamikbereich
• RGA Windows Software

Datasheet